| The morphology, cavity and crystalline orientation of the high purity Ru target with different sintering process were analyzed systematically by scanning electron microscope (SEM) and electron back scattering diffraction (EBSD). The results showed that, the sintering process was accelerated with increasing temperature, meanwhile, the porosity deduced, the grain grew up, the twinning occured and the {0001} crystal plane tended to parallel with surface. The sintering mechanism was the atom and void diffusing, which caused broadening of sintering neck and aggregating of shrinking cavity. In addition, the hot deformation as another important sintering mechanism was found clearly when the sintering occurred at elevated temperature, especially the twining deformation, and the main twin system was 94.8°/{10-12}. |
