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| 三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(III)的合成及性质 |
| Synthesis and Characterization of Tris(2,2,6,6-tetramethyl-3,5-heptanedionato) Ruthenium(III) |
| 投稿时间：2014-06-03 |
| DOI： |
| 中文关键词: 三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(III) 合成 结构特征 |
| 英文关键词: tris(2,2,6,6- tetramethyl-3,5-heptanedionato) ruthenium synthesis chemical structure |
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| 中文摘要: |
| 以三氯化钌和2,2,6,6-四甲基-3,5-庚二酮为原料，在甲醇中合成了β-二酮前驱体—三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(III)。通过元素分析、红外光谱、核磁共振谱、紫外-可见光谱等对其进行了表征，确定了配合物的结构组成。采用TG-DTA分析了配合物在空气和氮气中的热分解行为，为MOCVD 镀钌和钌的氧化物薄膜工艺提供热力学数据与参考。 |
| 英文摘要: |
| A precursor, tris(2,2,6,6-tetramethyl-3,5-heptanedionato ) ruthenium (Ru(thd)3) was synthesized from RuCl3 and Hthd in methanol. The structure of Ru(thd)3 was characterized by element analysis, infrared spectroscopy, NMR spectroscopy and UV-vis spectrum. The thermal decomposition behavior was studied by TG-DTA analysis under air and nitrogen. The results provided the thermodynamic data and reference for preparing ruthenium and ruthenium oxide thin film by MOCVD from Ru(thd)3. |
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