| NiPt alloy target was produced by melting, homogenization annealing, and warm-rolling. The structural variation of NiPt alloy during preparation was observed by using metallography, scanning electron microscopy (SEM), X-ray diffraction (XRD), etc. And the relationship between the structure and surface morphologies of the target after sputtering was also investigated. The results show homogenization annealing treatment has obvious effect on the texture. The Vickers-hardness of the alloy after melting, homogenization annealing, and rolling was 292, 218, and 439, and the corresponding texture was (200), (311), and mixed (200) and (220), respectively. The microstructure of the target has relevance to the surface morphologies after sputtering. |
