| The ruthenium powder of ruthenium target in the electronics industry has strict requirements for the purity(99.999%), dispersibility, morphology and size. High-performance ruthenium powder is only prepared in the laboratory, and has not yet been used in production. In the preparation of high-performance ruthenium powder, there is a big gap with foreign countries, and the ruthenium target used in China mainly relies on imports. The production methods, process and test methods of Ru powder for ruthenium target are analyzed and summarized at home and abroad, and some suggestions on preparation Ru powder for ruthenium target are also proposed in China. |
