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| Ni-5Pt 合金在冷轧过程中的结构演变及力学性能 |
| Microstructure Evolution and Mechanical Properties of Ni-5Pt Alloy during Cold Rolling |
| 投稿时间：2017-03-30 修订日期：2017-06-28 |
| DOI：10.14093/j.cnki.cn10-1132/d.2018.01.004 |
| 中文关键词: 金属材料 靶材 NiPt 合金 冷轧 位错 晶粒细化 |
| 英文关键词: metal materials sputtering target NiPt alloy cold rolling dislocation grain refinement |
| 基金项目:国家重点研发计划项目(2017YFB0305503)、云南省国际合作计划项目(2014IA037)。 |
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| 中文摘要: |
| 镍铂合金溅射靶材在半导体工业中用于制备镍铂硅化合物，实现接触和互连的功能。Ni-5Pt合金在冷轧过程中的结构演变及力学性能进行了研究。结果表明，Ni-5Pt 合金在冷轧过程中其微观演变为从位错缠结到位错墙，再到含位错墙和小角晶界的拉长亚晶粒，最后形成了具有明锐晶界的拉长晶粒。晶粒细化主要是受位错的聚集、湮灭和重排所导致。Ni-5Pt 的显微硬度随着轧制变形量的增加而增加，与强度的变化一致。Ni-5Pt 强度的增加可主要归因于冷轧诱导的位错密度增加和晶粒细化效应。 |
| 英文摘要: |
| Nickel-platinum (NiPt) alloy sputtering target was used in semiconductor industries for the formation of Ni-Pt-silicide to realize the contact and interconnection functions. The microstructure evolution of a Ni-5Pt alloy was studied during the cold-rolling process, and the mechanical properties were also studied. The results showed that, during the cold-rolling process of the Ni-5Pt alloy, the microstructure evolved from dislocation tangles to dislocation walls, and then elongated subgrains with both dislocation walls and low grain boundaries, finally became elongated grains with sharp grain boundaries. The grain refinement was mainly controlled by the accumulation, annihilation and rearrangement of the dislocations. The microhardness of Ni-5Pt increased with rolling reduction, which was consistent with the variation in strength. The increase in strength of the Ni-5Pt alloy was believed to be primarily because of the cold rolling-induced increase in dislocation density and the grain refinement effect. |
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