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| 键合参数对AgAuPdRu键合线键合性能影响研究 |
| Effects of Bonding Parameters on Bonded Properties for AgAuPdRu Alloy Bonding Wire |
| 投稿时间：2019-04-16 |
| DOI： |
| 中文关键词: 银基键合线 无空气焊球(FAB) 烧球时间 烧球电流 键合功率 键合压力 |
| 英文关键词: Ag alloy bonding wire FAB EFO current EFO time bonded power bonded force |
| 基金项目:河南省高等学校重点科研项目项目(19B430006) |
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| 中文摘要: |
| 利用扫描电镜研究φ0.025 mm的Ag-0.8Au-0.3Pd-0.03Ru银基键合线不同键合参数对无空气焊球(free air ball，FAB)形状及球焊点、楔焊点形貌的影响，结果表明，烧球电流或者烧球时间其中之一不变时，FAB直径随着烧球时间(烧球电流一定)和烧球电流(烧球时间一定)的增加而增大，烧球电流为30 mA、烧球时间为700 μs时，键合线FAB呈标准圆球形；键合压力一定时，键合线球焊点焊盘直径随着超声功率的增大而显著增加，键合功率为80 mW、键合压力0.30 N时，球焊点具有较好的微观形貌；键合压力为0.25 N，超声功率为80 mW时，楔焊点具有规则的鱼尾形貌，并具有较好的连接强度。 |
| 英文摘要: |
| The effects of different bonding parameters on the performance of φ0.025mm Ag-0.8Au- 0.3Pd-0.03Ru alloy bonding wire were analyzed by using scanning electron microscope. The results showed that, if electronic flame off (EFO) current is constant, the free air ball (FAB) diameters will elongate with the increase of the electronic flame off time. And the ball will expand as the electronic flame off (EFO) current is intensified, if electronic flame off time is fixed. The alloy bonding wire free air ball will be in a standard ball-shape when the electronic flame off current and time are 30 mA and for 70 μs, respectively. At a constant bonding force, the bonded pad diameters will augment significantly with the elevation of the ultrasonic power used. For Ag-0.8Au-0.3Pd-0.03Ru alloy bonding wire, the bonded ball would be in good shape if a bonding power of 80 mW and a bondingforce of 0.30 N were selected, and the second bonded ball would be in a regular shape with excellent bonded strength when 0.25 N bonding force and 80 mW bonding power were used. |
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