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| Ir/HfO2复合涂层的制备及性能研究 |
| Preparation and properties of Ir/HfO2 composite coatings |
| 投稿时间：2022-04-12 |
| DOI： |
| 中文关键词: 化学气相沉积 Ir/HfO2复合涂层 氧化性能 |
| 英文关键词: chemical vapor deposition (CVD) Ir/HfO2 composite coating oxidation properties |
| 基金项目:云南省创新引导与科技型企业培育计划(202104AR040017)；云南省重点研发计划(202203ZA080001)；云南省重点研发计划(202203ZA080001) |
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| 中文摘要: |
| 利用化学气相沉积(CVD)技术制备了HfO2涂层和Ir/HfO2复合涂层，采用金相显微镜(OM)、扫描电镜(SEM)、电子探针(EPMA)对涂层的性能进行分析。结果表明:在沉积Ir时，沉积室升温速率≤10 ℃/min时，制备出的Ir/HfO2复合涂层经真空高温热处理后可获得表面质量良好的Ir层，且Ir层纯度达到99.77%；真空热处理有益于提高Ir/HfO2复合涂层之间的结合程度，且热处理温度越高，结合效果越好；表面制备有HfO2涂层的Ir棒在1980 ℃氧化10 h的条件下，HfO2涂层对Ir的保护效果显著，可将Ir的氧化深度由毫米级降至数十微米。 |
| 英文摘要: |
| HfO2 coatings and Ir/HfO2 composite coatings are prepared by chemical vapor deposition (CVD). The properties of the coatings are analyzed by optical microscopy (OM), scanning electron microscopy (SEM) and electron probe microanalysis (EPMA). The results show that a good surface quality on Ir/HfO2 composite coating can still be maintained after heat treatment when the heating rate of the deposition chamber is less than 10 ℃/min, and the purity of Ir layer can reach 99.77%. Vacuum heat treatment is beneficial to improve the bonding degree between Ir/HfO2 composite coatings, and the bonding effect increases with the rise of heat treatment temperature. When Ir rod with HfO2 coating on the surface was oxidized at 1980 °C for 10 h，HfO2 coating had a remarkable protective effect on Ir, and the oxidation depth of Ir was reduced from millimeter level to tens of microns. |
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