Abstract
脉冲红外和热导检测法测定钌粉和钌靶中氧、氮含量
Determination of Oxygen and Nitrogen Content in Ru Powder and Target by Pulsed Infrared and Thermal Conductivity Detection Method
Received:January 22, 2013  
DOI:
中文关键词: 分析化学  钌粉  钌靶  氧、氮含量
英文关键词: analytic chemistry  ruthenium powder  ruthenium target  content of oxygen and nitrogen
基金项目:国家高技术研究发展计划(863计划)项目(2012AA063203)、国家自然科学基金(51262015)、云南省自然科学重点基金(2010ZC261)和云南省自然科学基金(2010ZC55)。
Author NameAffiliationE-mail
LIU Wei Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China liuweiynkm@sina.com 
LIU Wen Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China  
HAN Shouli Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China  
HE Xiaotang Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China  
TAN Zhilong State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
FANG Wei State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
WANG Yingjin State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
YANG Xiaotao State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
GAN Jianzhuang State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
TANG Fajing State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China  
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中文摘要:
      建立了钌粉和钌靶中氧、氮含量的测定方法。研究了样品前处理、仪器条件、助熔剂选择、方法准确度和精密度等。以锡-碳作助熔剂,在选定条件下,采用脉冲红外和热导检测法,测定50×10-6氧时RSD<10%,测定40×10-6氮时RSD<25%;加标回收率:氧100%~102%,氮91%~101%。测定范围:氧0.002%~0.4%,氮0.0001%~0.02%。方法简便、快速、精密度和准确度满足质量控制要求。
英文摘要:
      A method using the pulsed infrared-thermal conductivity detection has been established to determine O and N content in Ru powder and target. Pre-treatment of the samples, testing condition of the equipment, choice of the accelerators, accuracy and precision of the method were investigated. Under the optimized conditions with Sn-C as an accelerator, the RSD (Relative standard deviation, n=7) was found to be <10% for oxygen analysis when its content did not exceed 50×10-6, and <25% for nitrogen analysis when its content was no more than 40 ×10-6. The recovery for standard addition test was 100%~102% for oxygen and 91%~101% for nitrogen. The measuring ranges were 0.002%~0.4% for oxygen and 0.0001%~0.02% for nitrogen. The accuracy and precision of the method are satisfactory.
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