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脉冲红外和热导检测法测定钌粉和钌靶中氧、氮含量 |
Determination of Oxygen and Nitrogen Content in Ru Powder and Target by Pulsed Infrared and Thermal Conductivity Detection Method |
Received:January 22, 2013 |
DOI: |
中文关键词: 分析化学 钌粉 钌靶 氧、氮含量 |
英文关键词: analytic chemistry ruthenium powder ruthenium target content of oxygen and nitrogen |
基金项目:国家高技术研究发展计划(863计划)项目(2012AA063203)、国家自然科学基金(51262015)、云南省自然科学重点基金(2010ZC261)和云南省自然科学基金(2010ZC55)。 |
Author Name | Affiliation | E-mail | LIU Wei | Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China | liuweiynkm@sina.com | LIU Wen | Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China | | HAN Shouli | Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China | | HE Xiaotang | Sino-Platinum Metals Resources Yimen Co.Ltd., Yimen 651100, Yunnan, China | | TAN Zhilong | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | | FANG Wei | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | | WANG Yingjin | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | | YANG Xiaotao | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | | GAN Jianzhuang | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | | TANG Fajing | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co.Ltd., Kunming 650106, China | |
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中文摘要: |
建立了钌粉和钌靶中氧、氮含量的测定方法。研究了样品前处理、仪器条件、助熔剂选择、方法准确度和精密度等。以锡-碳作助熔剂,在选定条件下,采用脉冲红外和热导检测法,测定50×10-6氧时RSD<10%,测定40×10-6氮时RSD<25%;加标回收率:氧100%~102%,氮91%~101%。测定范围:氧0.002%~0.4%,氮0.0001%~0.02%。方法简便、快速、精密度和准确度满足质量控制要求。 |
英文摘要: |
A method using the pulsed infrared-thermal conductivity detection has been established to determine O and N content in Ru powder and target. Pre-treatment of the samples, testing condition of the equipment, choice of the accelerators, accuracy and precision of the method were investigated. Under the optimized conditions with Sn-C as an accelerator, the RSD (Relative standard deviation, n=7) was found to be <10% for oxygen analysis when its content did not exceed 50×10-6, and <25% for nitrogen analysis when its content was no more than 40 ×10-6. The recovery for standard addition test was 100%~102% for oxygen and 91%~101% for nitrogen. The measuring ranges were 0.002%~0.4% for oxygen and 0.0001%~0.02% for nitrogen. The accuracy and precision of the method are satisfactory. |
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