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| 高纯钌靶烧结过程微结构和烧结机制研究 |
| Study on the Microstructure and Mechanism of High Purity Ru Target During Sintering Process |
| Received:March 15, 2019 |
| DOI： |
| 中文关键词: 金属材料 钌靶 烧结 界面 孪生 |
| 英文关键词: metal materials Ru target sintering boundary twining |
| 基金项目:国家重点研发计划重点基础材料技术提升与产业化项目(2017YFB0305500) |
| Author Name | Affiliation | E-mail | | WANG Shuming* | Guobiao Beijing Testing & Certification Co., Ltd, Beijing 100088, China | wsm200606@126.com | | ZUO Yuting | Guobiao Beijing Testing & Certification Co., Ltd, Beijing 100088, China | | | DU Fengzhen | Guobiao Beijing Testing & Certification Co., Ltd, Beijing 100088, China | | | ZHANG Zhihui | Guobiao Beijing Testing & Certification Co., Ltd, Beijing 100088, China | | | WEN Ming | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino Platinum Metals Co., Ltd., Kunming 650106, Yunnan, China | | | GUO Junmei | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino Platinum Metals Co., Ltd., Kunming 650106, Yunnan, China | |
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| 中文摘要: |
| 采用扫描电镜、背散射电子衍射对比分析了不同烧结工艺制备的高纯钌靶的晶粒尺寸，孔隙分布和取向分布等组织特征。结果表明，随着烧结温度的提高，烧结进程加快，靶材的孔隙度显著减少，晶粒长大，晶粒发生显著孪生，晶体取向有{0001}晶面平行于表面的择优趋势。烧结机制主要为扩散作用下的烧结颈扩大和微孔收缩聚合；当温度较高时，高温变形是钌靶烧结的重要机制，尤其是孪生变形，而触发的孪生系多为94.8°/{10-12}。 |
| 英文摘要: |
| The morphology, cavity and crystalline orientation of the high purity Ru target with different sintering process were analyzed systematically by scanning electron microscope (SEM) and electron back scattering diffraction (EBSD). The results showed that, the sintering process was accelerated with increasing temperature, meanwhile, the porosity deduced, the grain grew up, the twinning occured and the {0001} crystal plane tended to parallel with surface. The sintering mechanism was the atom and void diffusing, which caused broadening of sintering neck and aggregating of shrinking cavity. In addition, the hot deformation as another important sintering mechanism was found clearly when the sintering occurred at elevated temperature, especially the twining deformation, and the main twin system was 94.8°/{10-12}. |
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