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| LTCC钌系厚膜电阻电性能影响因素研究综述 |
| Review on Study of Factors Affecting Electrical Performance of Ruthenium-based Thick Film Resistor for LTCC |
| Received:December 27, 2019 |
| DOI： |
| 中文关键词: 钌系厚膜电阻(RTFR) 导电相 粘接相 改性剂 有机载体 共烧匹配 |
| 英文关键词: ruthenium-based thick film resistor (RTFR) conductive phase bonding phase modifier organic carrier co-firing compatibility |
| 基金项目: |
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| 中文摘要: |
| 钌系厚膜电阻具有阻值精度高、稳定可靠性高、工艺重复性好等优点，在厚膜混成电路制造中占据重要的地位。综述了钌系厚膜电阻电性能的影响因素，阐述导电相、粘接相、改性剂及有机载体与共烧电阻体电性能的关系，并针对国内高品质钌系厚膜电阻浆料面临的主要问题，提出原料粉体性能可控性制备，浆料制备工艺的优化设计与表征，浆料与生瓷带共烧匹配以及浆料无铅化等研究方向。 |
| 英文摘要: |
| Ruthenium-based thick film resistor (RTFR) has the advantages of high resistance accuracy, high stability and reliability, and good process repeatability. It occupies an important position in the manufacture of thick film hybrid integrated circuit. The factors affecting the electrical performances of RTFR are reviewed. The relationship between the electrical properties of cofired resistors and each factor in paste, including the conductive phase, bonding phase, modifier and organic carrier are discussed. For the main problems faced by domestic high quality RTFRP manufacturers, the controllable preparation of raw material powder, the optimal design and characterization of the paste preparation process, the compatibility of paste co-firing with green tape and the lead-free paste are proposed. |
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