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半导体用高纯金制备技术及应用研究进展 |
Research progress on preparation technology and application of high purity gold for semiconductor |
Received:June 09, 2021 |
DOI: |
中文关键词: 贵金属冶金 高纯金 化学还原分离 熔融氯化 溶剂萃取 电解 |
英文关键词: precious metal metallurgy high purity gold chemical reduction separation molten chlorination solvent extraction electrolysis |
基金项目:国家自然科学基金项目(21763014) |
Author Name | Affiliation | E-mail | YANG Shan-xiao* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | 932411172@qq.com | YIN Zhao-jin* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | | LI Ji-gang* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | | WANG Jian-hui* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | | ZHANG Feng* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | | MA Zhi-bin* | Kunming Institute of Precious Metals, State Key Laboratory of Advanced Technologies for ComprehensiveUtilization of Platinum Metals, Sino-Platinum Metals Co. Ltd.,Kunming 650106, China | |
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中文摘要: |
综述了目前制备高纯金的各种方法的原理及工艺,并对其优缺点进行了分析。化学还原分离法效率高、周期短,但酸耗大、污染严重;熔融氯化法对原料适应范围广,但存在氯化过程复杂、工艺难于精准控制和产品质量不稳定等不足;溶剂萃取法效率高、产品质量稳定,但试剂消耗大、有机污染严重和易燃易爆;电解法具有成本低、除杂效果好、产品纯度稳定性强及环境污染小的优点,但原料适应性相对较差、生产周期相对较长且会积压金。高纯金具体应用形式为键合用金丝、溅射靶材及高纯度金基合金,涉及电子、半导体及航空航天等领域。 |
英文摘要: |
The principle and technology of various methods for preparing high purity gold are reviewed, and their advantages and disadvantages are analyzed. The chemical reduction separation method has the advantages of high efficiency and short cycle, but high acid consumption and serious pollution; the melting chlorination method has a wide range of adaptability to raw materials, but it has some shortcomings such as complex chlorination process, difficult to accurately control the process and unstable product quality; the solvent extraction method has high efficiency and stable product quality, but large reagent consumption, serious organic pollution and inflammable and explosive properties; the electrolytic method has low cost and impurity removal effect. However, the adaptability of raw materials is relatively poor, the production cycle is relatively long and there will be a backlog of gold. The specific application forms of high-purity gold include bonding gold wire, sputtering target and high-purity gold based alloy, involving the fields of electronics, semiconductor and aerospace. |
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